Plasma Etch Rework Process
Original Publication Date: 1979-Nov-01
Included in the Prior Art Database: 2005-Feb-20
The encapsulation of modules containing integrated semiconductor chips with an organic polymer formulation is usually accompanied by some splashing of the polymer resin onto the module pins. When the module is cured to effect sealing, the polymer on the module pins contaminates them and interferes with their electrical function.