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Process For Maintaining Wafer On Carrier During Single Side Polishing

IP.com Disclosure Number: IPCOM000068052D
Original Publication Date: 1979-Nov-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Brun, J Lacombe, C [+details]

Abstract

Single-wafer polishers become more and more competitive with multiwafer polishers when the diameter increases, because the latter require prohibitively high force to exert sufficient pressure for several wafers.