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After the object to be measured has been subjected to light of a known wavelength lambda, the interference or Moire pattern obtained is digitized and stored as image file I.
English (United States)
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Electronic Evaluation Of Interference Or Moire Patterns For Detecting
Differences In Height During Planeness Measurements
After the object to be measured has been subjected to light of a known
wavelength lambda, the interference or Moire pattern obtained is digitized and
stored as image file I.
Then, the object to be measured is lifted in a known manner by less than
lambda/2. The interference or Moire pattern is also digitized and immediately
processed as image file II or stored.
The slope sign of the profile is determined by phase comparison of the image
points of image files I and II. The height profile is determined by adding the
height lines of image file I line-by-line in accordance with the sign of the slope.
The spacing of two successive height lines is determined, for example, by an
algorithm, using a particular scale factor of mu m or mu".
For objects arranged on a slope, the height profile determined can be
subjected to a reference plane by means of an algorithm, thus separating the
height profile superimposed by the slope.