Electrostatic Cleaning System
Original Publication Date: 1979-Dec-01
Included in the Prior Art Database: 2005-Feb-20
This system removes microscopically detected contamination particles from the surfaces of a thick film substrate and the hybrid components mounted thereto prior to the hermetic sealing of the components and substrate in a modular package assembly process. The particle sizes a generally in the range of 10 to 200 microns.