Browse Prior Art Database

Clip-On Etch End-Point Detector

IP.com Disclosure Number: IPCOM000068255D
Original Publication Date: 1979-Dec-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Bohan, LM [+details]

Abstract

In wet batch processing for etching and developing, variations in the extent of developing and etching may be considerable from batch to batch. Developing and etching uniformity may be described by the following equation: (Image Omitted)