Browse Prior Art Database

Self-Aligned Recessed Oxide Isolation Process/Structure To Minimize "Bird's Beak" Formation

IP.com Disclosure Number: IPCOM000068259D
Original Publication Date: 1979-Dec-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Benjamin, CE [+details]

Abstract

A process and structure are described which avoid density limitations and tolerance problems resulting from "bird's beak" formation in standard recessed oxide isolation (ROI), with no additional masking steps.