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Elimination Of Thickness Fringes In Infrared Spectrometry Disclosure Number: IPCOM000068270D
Original Publication Date: 1979-Dec-01
Included in the Prior Art Database: 2005-Feb-20

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Froot, HA Kulkarni, MV [+details]


Thickness fringes obtained on thin silicon slices (approximately 15to 30-mil thick) make the measurements of impurities with a peek width of the order of the fringe width very difficult. The thickness fringes occur because the phase coherence of the source radiation is maintained even after reflections and transmission of radiation at least two times through the sample.