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High Resolution Etching Of Molybdenum

IP.com Disclosure Number: IPCOM000068310D
Original Publication Date: 1979-Dec-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Missel, L [+details]

Abstract

High resolution etching of molybdenum is obtained by using a buffered ferricyanide solution such as the following bath: KH(2)PO(4) 50 g/1 K(3)Fe(CN)(6) 8 g/1 Wetting agent Perfluorooctyl 25 pts/million Sulfonic Acid Salt (optional) Temperature Ambient pH >5.8 Mo removal rate at pH 6.6 and 20 +/- 1 angstroms/sec 25 degrees C in above bath (slow agitation) above bath (slow agitation)