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Variable Thin Film Thickness Apparatus

IP.com Disclosure Number: IPCOM000068344D
Original Publication Date: 1979-Dec-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
DaSilva, EM Terhune, CE [+details]

Abstract

A method is described for producing composition gradients in films by using a sliding shutter in a physical deposition process which provides singular or combined film thickness profiles on the substrate. This enables deposition of a wide range of material thickness ratios in one vacuum pump-down from one or more film depositions.