Variable Thin Film Thickness Apparatus
Original Publication Date: 1979-Dec-01
Included in the Prior Art Database: 2005-Feb-20
A method is described for producing composition gradients in films by using a sliding shutter in a physical deposition process which provides singular or combined film thickness profiles on the substrate. This enables deposition of a wide range of material thickness ratios in one vacuum pump-down from one or more film depositions.