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Use Of Ion Induced Auger Electron Spectrosco py In Ion Microanalysis

IP.com Disclosure Number: IPCOM000068406D
Original Publication Date: 1979-Sep-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Kaus, G Kempf, J Schmid, G Seybold, D [+details]

Abstract

The emission of Auger electrons can be obtained by directing a beam of energetic primary ions (e.g., Ar/+/) on to the surface of a bulk specimen. The spectrum of these Auger electrons contains two components, namely, bulk-like Auger transitions, originating from atoms bound in the solid, and atomic-like transitions, originating from particles released from the solid by the primary ions.