Use Of Ion Induced Auger Electron Spectrosco py In Ion Microanalysis
Original Publication Date: 1979-Sep-01
Included in the Prior Art Database: 2005-Feb-20
The emission of Auger electrons can be obtained by directing a beam of energetic primary ions (e.g., Ar/+/) on to the surface of a bulk specimen. The spectrum of these Auger electrons contains two components, namely, bulk-like Auger transitions, originating from atoms bound in the solid, and atomic-like transitions, originating from particles released from the solid by the primary ions.