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Determining The Surface Concentration Of Dopants In Semiconductors

IP.com Disclosure Number: IPCOM000068408D
Original Publication Date: 1979-Sep-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Briska, M Schmitt, A Wagner, H [+details]

Abstract

Reflectance measurements are used to determine the surface concentration of dopants in semiconductor materials.