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This scheme permits precision trimming of outside edges of metal masks so that the functional mask pattern is "dead center" relative to the outside edges.
English (United States)
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Metal Mask Trimming Tool
This scheme permits precision trimming of outside edges of metal masks so
that the functional mask pattern is "dead center" relative to the outside edges.
As illustrated in Fig. 1A, the metal mask 1 having an etched functional pattern
4 is trimmed so that the pattern 4 is centered relative to the outside edges, as in
Fig. 1B. Referring now to Fig. 2, mask 1 is placed on a vacuum reference plate 5. An optical magnifier is rotated over a light guide position 6. Mask 1 is aligned
with position 6 via an alignment hole 2 etched in the mask 1.
A vacuum switch is turned on applying vacuum only in the area surrounding
the alignment hole 2. This area is free to rotate by a pivot arrangement 16,
allowing the mask to be rotated to align hole 3 to light guide 7. After alignment,
another vacuum switch is turned on, and the first vacuum switch is turned off.
This transfers the vacuum from the pivot 16 to the groove 15 for holding the
mask firmly to the plate 5.
The reference plate 5 is lifted from the support 14 by the handle 11, inverted
as shown in Fig. 3, and placed mask down on the shear support base 18. The
reference plate 5 is pushed against the upper shear blade 17 so that the mask is
positioned in the shear between the upper and lower cutting blades 17, 18 and is
then sheared. The operation is repeated for all sides until the mask has been
completely trimmed to equal the outside dimensions of the vacuum reference