Browse Prior Art Database

Use of Polyimide to Obtain a Smooth Surface

IP.com Disclosure Number: IPCOM000068488D
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Abolafia, OR Rasile, J [+details]

Abstract

Ceramic is widely used as a substrate for integrated circuit modules. Any roughness on the surface of the ceramic is a limiting factor in obtaining fine resolution circuitry. Ceramics with smoother surfaces are available, however, they are generally relatively expensive.