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Use of Polyimide to Obtain a Smooth Surface Disclosure Number: IPCOM000068488D
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20

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Abolafia, OR Rasile, J [+details]


Ceramic is widely used as a substrate for integrated circuit modules. Any roughness on the surface of the ceramic is a limiting factor in obtaining fine resolution circuitry. Ceramics with smoother surfaces are available, however, they are generally relatively expensive.