Browse Prior Art Database

Evaporator Design to Deposit Oxide/Hydroxide containing Chromium Films

IP.com Disclosure Number: IPCOM000068519D
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Conlin, BD Kulkarni, MV Smith, TL Wey, SJ [+details]

Abstract

Described herein is a method with experimental results and gas-kinetic theory consideration in order to improve the reproducibility of oxygen content of Cr-films (evaporation) deposited on different systems.