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Evaporator Design to Deposit Oxide/Hydroxide containing Chromium Films Disclosure Number: IPCOM000068519D
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20

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Conlin, BD Kulkarni, MV Smith, TL Wey, SJ [+details]


Described herein is a method with experimental results and gas-kinetic theory consideration in order to improve the reproducibility of oxygen content of Cr-films (evaporation) deposited on different systems.