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Chrome Copper Chrome Lift Off Process

IP.com Disclosure Number: IPCOM000068521D
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Dalal, H Galicki, A Havas, J Ting, C [+details]

Abstract

This is an improved lift-off process in which at least two expendable metals are used, each of which is attacked by an etchant which does not attack the other metal. The upper expendable metal is used to provide the overhang and the second is to provide a standoff. A third bottom layer is used whenever the selected metal for standoff exhibits poor adhesion or when a barrier metal underneath the interconnection metallurgy is desired, e.g., a refractory metal.