Test Site to Determine Accuracy of Automatic Probing Systems
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20
Much electrical test data is collected by automatic or semi-automatic testing systems that repeat the same test or sequence of tests very rapidly over a large sample. Usually the only operator intervention is the initial setup and alignment of the probes. Data so collected is usually recorded on tape and does not become visible until all testing is complete and final results are printed. Examples of this type of system would be kerf testing, special process monitor test sites and final product chip testing. In all of these cases, multiple chips are tested on a wafer through the use of an automatic stepping system. Product chips can also be final tested after dicing by use of a feeding system to continually advance the chips.