Wafer Cushion Retention System in Controlled Environment
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20
A pneumatic control system is shown in Figs. 1 and 2 which provides a means by which a transient or stored semiconductor wafer environment can be controlled. Shock and subsequent wafer breakage is greatly reduced by retaining wafers in cavities 11 of a carrier tray 12 which is retained within a canister 13. Three pneumatically inflated rubber fingers 14, provided within the interior of the canister, encompass and contact each wafer at 120 degree intervals.