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Load Unload Fixture for Universal Wafer Carrier Disclosure Number: IPCOM000068534D
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue


Related People

Geany, GM Knapp, DG Masterson, FH [+details]


This fixture provides a controlled means of manually removing a universal wafer carrier, such as that disclosed in the preceding article, from its canister for the loading and unloading of semiconductor wafers in a clean air environment.