Browse Prior Art Database

Load Unload Fixture for Universal Wafer Carrier

IP.com Disclosure Number: IPCOM000068534D
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Geany, GM Knapp, DG Masterson, FH [+details]

Abstract

This fixture provides a controlled means of manually removing a universal wafer carrier, such as that disclosed in the preceding article, from its canister for the loading and unloading of semiconductor wafers in a clean air environment.