Efficient Stitching Method
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20
Stitching of electron (E)-beam fields to make large semiconductor chips has not yet been incorporated into commercial product programs. Several drawbacks have been identified that have made chip designers reluctant to use stitching. The technique described herein could be used for array designs and may be extendable to logic designs.