Browse Prior Art Database

Reaction By Products Collection Surface for Metal and Quartz Reactive Ion Etch Systems

IP.com Disclosure Number: IPCOM000068536D
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Gartner, HM Hoeg, AJ Sarkary, HG [+details]

Abstract

A water-cooled collection surface is located circumferentially (axially) around the periphery of the cathode. The surface must be positioned so that the flowing reaction by-products have a maximum probability of impinging and condensing on its surface.