Reaction By Products Collection Surface for Metal and Quartz Reactive Ion Etch Systems
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20
A water-cooled collection surface is located circumferentially (axially) around the periphery of the cathode. The surface must be positioned so that the flowing reaction by-products have a maximum probability of impinging and condensing on its surface.