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Reaction By Products Collection Surface for Metal and Quartz Reactive Ion Etch Systems Disclosure Number: IPCOM000068536D
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20

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Gartner, HM Hoeg, AJ Sarkary, HG [+details]


A water-cooled collection surface is located circumferentially (axially) around the periphery of the cathode. The surface must be positioned so that the flowing reaction by-products have a maximum probability of impinging and condensing on its surface.