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Air Film Device for Controlled Linear Movement of Wafers Without Edge Contact

IP.com Disclosure Number: IPCOM000068538D
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Hassan, JK Paivanas, JA [+details]

Abstract

The lateral control of a wafer gliding on an air film is intrinsically difficult because of low film friction in conjunction with momentum of the moving wafer. Consequently, some edge contact occurs which may result in wafer damage.