Automatic Brewster's Angle Thin Film Thickness Measurement Spectrophotometer
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20
An automatic instrument, as shown in the figure, is capable of measuring individual layer thicknesses of a composite film to a high degree of accuracy by measuring the relative intensity of the S (perpendicular polarized light) and P (parallel polarized light) components of polarized light reflected at Brewster's angle, as the wavelength of the incident light is varied. An example of a composite film is SiO(2) on Si(3)N(4) on a silicon semiconductor wafer.