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Automatic Brewster's Angle Thin Film Thickness Measurement Spectrophotometer

IP.com Disclosure Number: IPCOM000068552D
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Chwalow, MLE Goetz, WE Jackson, RN Kapppel, G Tuttle, JA [+details]

Abstract

An automatic instrument, as shown in the figure, is capable of measuring individual layer thicknesses of a composite film to a high degree of accuracy by measuring the relative intensity of the S (perpendicular polarized light) and P (parallel polarized light) components of polarized light reflected at Brewster's angle, as the wavelength of the incident light is varied. An example of a composite film is SiO(2) on Si(3)N(4) on a silicon semiconductor wafer.