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Analysis of Bulk Precipitates

IP.com Disclosure Number: IPCOM000068557D
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Bohg, A Brandis, EK [+details]

Abstract

The technique described herein allows the sensitive identification of small precipitates (ppts) within any matrix, e.g., a silicon wafer, an Al film, or a glass. The technique is described, however, for the case of precipitates in a silicon wafer.