Reference Mark for Locating a Wafer in Semiconductor Rod
Original Publication Date: 1978-Jan-01
Included in the Prior Art Database: 2005-Feb-20
The quality of a semiconductor wafer and particularly its impurity content level is highly dependent of its position in the rod. A solution to the problem of determining this position is to provide an oblique groove in the flat zone of the rod. Since the distance x is proportional to d, any sliced wafer will contain the information relating to its position in the rod. This method permits one to determine what portions of the rod provide good electrical yields.