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Use of an Unplated Tungsten Filament During Evaporation of Chrome Disclosure Number: IPCOM000068694D
Original Publication Date: 1978-Feb-01
Included in the Prior Art Database: 2005-Feb-20

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Carpenter, C DiAngelo, DW Sarab, AD [+details]


In the process of evaporating chrome-copper-gold contacts onto semiconductor wafers, a tungsten-plated chrome filament is commonly used in the evaporation of the granular chrome. Undesirable amounts of chrome-oxide are often formed in the contact using this method.