Use of an Unplated Tungsten Filament During Evaporation of Chrome
Original Publication Date: 1978-Feb-01
Included in the Prior Art Database: 2005-Feb-20
In the process of evaporating chrome-copper-gold contacts onto semiconductor wafers, a tungsten-plated chrome filament is commonly used in the evaporation of the granular chrome. Undesirable amounts of chrome-oxide are often formed in the contact using this method.