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Simultaneous Co Evaporation of Thick Metal Films

IP.com Disclosure Number: IPCOM000068695D
Original Publication Date: 1978-Feb-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Galyon, GT Lee, AP Martin, HJ Williams, TO [+details]

Abstract

Metal evaporation rates are dependent on the volatility of each specie being evaporated. Constituents of alloys evaporate at different rates when heated together in the same source container. The resultant film is therefore stratified, i.e., layered. In the case of Pb and In, the Pb vaporized first, and the as-evaporated pad is layered, with In atop the Pb.