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Multiple Probe Head With Photolithographic Accuracy Disclosure Number: IPCOM000068729D
Original Publication Date: 1978-Feb-01
Included in the Prior Art Database: 2005-Feb-20

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Fischer, W [+details]


This article describes a technique which avoids the time-consuming manual, fine adjustment of many contact needles in probe heads used to test LSI circuits and achieves a higher degree of accuracy.