Mask Holder for Semiconductor Device Manufacture
Original Publication Date: 1978-Feb-01
Included in the Prior Art Database: 2005-Feb-20
Fig. 1 is a perspective of a holder for two glass masks 1 and 2. The masks are identical and represent patterns that are to be formed on opposite sides of a metal sheet (not shown) so that the sheet can be etched from both sides to form a metal mask that corresponds to the glass masks 1 and 2. Masks 1 and 2 are attached to plastic parts 3 and 4, respectively, which are attached to a spacer 5. Parts 3 and 4 have flexible regions 6 or 7, respectively, with each region forming a hinge to permit the opening of its associated part. Diaphragms 8 and 9 (Fig. 2), mounted between spacer 5 and flexing parts 3 and 4, are connected to a source of vacuum or pressurized air through a bore in spacer 5 (not shown). The diaphragms are slightly pressurized to cause the flexing parts to be opened to the position shown in Fig.