Organic Film Deposition Electrode
Original Publication Date: 1978-Feb-01
Included in the Prior Art Database: 2005-Feb-20
A critical measure of any practical film deposition process is its ability to form uniform pinhole-free thin films both over a large surface area and uniformly as a function of thickness. The capacitively coupled diode system is used to produce uniform organic thin films over large areas based on a great deal of film deposition technology experience in a related technology, i.e., sputtering.