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Organic Film Deposition Electrode

IP.com Disclosure Number: IPCOM000068790D
Original Publication Date: 1978-Feb-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Kay, E Poenisch, A [+details]

Abstract

A critical measure of any practical film deposition process is its ability to form uniform pinhole-free thin films both over a large surface area and uniformly as a function of thickness. The capacitively coupled diode system is used to produce uniform organic thin films over large areas based on a great deal of film deposition technology experience in a related technology, i.e., sputtering.