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Glass Membrane Nozzle Fabrication

IP.com Disclosure Number: IPCOM000068838D
Original Publication Date: 1978-Feb-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Berkenblit, M Reisman, A [+details]

Abstract

Arrays of fine nozzles such as would be suitable for ink jet applications can be fabricated by forming arrays of small holes in an electron (E)-beam evaporated membrane of glass on a silicon substrate, forming the holes by etching through a resist pattern and subsequently removing the silicon substrate.