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Partitioning E Beam Data for Proximity Corrections

IP.com Disclosure Number: IPCOM000068859D
Original Publication Date: 1978-Feb-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Chang, TP Grobman, WD Speth, AJ [+details]

Abstract

This article presents an algorithm for solving, in part, a serious problem in small dimension (