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MNO(2) Removal Process

IP.com Disclosure Number: IPCOM000068871D
Original Publication Date: 1978-Mar-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Harris, MJ Slattery, WJ [+details]

Abstract

This article describes a simple process for removing permanganate films from polyimide layers, resulting in increased adhesion of thin films to the surfaces of the polyimide layer.