The following operators can be used to better focus your queries.
( ) , AND, OR, NOT, W/#
? single char wildcard, not at start
* multi char wildcard, not at start
(Cat? OR feline) AND NOT dog?
Cat? W/5 behavior
(Cat? OR feline) AND traits
Cat AND charact*
This guide provides a more detailed description of the syntax that is supported along with examples.
This search box also supports the look-up of an IP.com Digital Signature (also referred to as Fingerprint); enter the 72-, 48-, or 32-character code to retrieve details of the associated file or submission.
Concept Search - What can I type?
For a concept search, you can enter phrases, sentences, or full paragraphs in English. For example, copy and paste the abstract of a patent application or paragraphs from an article.
Concept search eliminates the need for complex Boolean syntax to inform retrieval. Our Semantic Gist engine uses advanced cognitive semantic analysis to extract the meaning of data. This reduces the chances of missing valuable information, that may result from traditional keyword searching.
This article describes an improved inductive line on semiconductor devices passivated by organic films.
English (United States)
This text was extracted from a PDF file.
This is the abbreviated version, containing approximately
62% of the total text.
Page 1 of 1
Corrosion Protection by Aluminum Anodization
This article describes an improved inductive line on semiconductor devices
passivated by organic films.
In the past, semiconductor devices made of silicon were fabricated using
aluminum-copper lines as the metallurgy for interconnecting semiconductor
regions or devices located in a single substrate. The technique used was to
deposit an aluminum-copper line on an oxidized silicon substrate so as to permit
integration of semiconductor devices defined in the substrate. Following
deposition, lines were passivated by sputtering quartz over them.
Newer, denser semiconductor products now require a second metallurgical
layer over this sputtered quartz layer. Typically, this second metallurgical layer
has also been comprised of an aluminum-copper alloy and has been protected
by a coating of organic material, such as a polyimide.
Such polyimide protected metallurgy has found to be of concern, when long
term reliability is desired, for the organic coating does not appear to provide the
same long term protection from outside contaminants as does the sputtered
A solution to this problem, which increases the corrosion resistance of the
aluminum-copper lines beneath organic films, consists of anodically growing a
thick oxide on the aluminum-copper lines prior to the deposition of the organic
coating. This oxide grown on the line significantly increases the corrosion
resistance of the line such that the unit now has a long ter...