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Ion Beam Size Analyzer

IP.com Disclosure Number: IPCOM000068897D
Original Publication Date: 1978-Mar-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Vadehra, SK Wajda, WW [+details]

Abstract

The present structure is designed to be used in connection with conventional ion-beam equipment to effect beam alignment about a central axis, sizing of the beam in both the vertical and horizontal direction as well as to facilitate beam energy measurement. It is insertable in the path of the beam along the axis of the beam shown as line 10 in Fig. 1. The present structure consists of four rectangular slits 11, 12, 13, 14 formed in an opaque plate, analyzer target plate 15. Behind each of the slits is a corresponding isolated metallic strip shown by the dotted lines. Each of the strips is connected through conductive connector means 16, 17, 18 and 19 to four strip terminals 20, 21, 22 and 23, respectively.