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Reducing Glass Peaks by Ion Milling

IP.com Disclosure Number: IPCOM000068898D
Original Publication Date: 1978-Mar-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Frank, RA Petvai, SI Schnitzel, RH [+details]

Abstract

Ion milling is used to decrease the peaks in sputtered glass insulators disposed above conductive lands on semiconductors. The height of the peaks depends on the thickness of the underlying conductive lands as well as on the particular technique used to deposit the glass. The preferred technique for the glass deposition is the resputtering technique described in U. S. Patent 3,983,022.