Ion Bombardment Apparatus with Removable Extractor Assembly
Original Publication Date: 1978-Mar-01
Included in the Prior Art Database: 2005-Feb-20
In ion-beam apparatus used for ion implantation and other bombardment purposes, it is frequently necessary to remove the extractor assembly, i.e., the structure adjacent to the ion source which extracts and directs the ions from the source along the beam line toward the target. In conventional ion implantation, the removal of the extractor is a lengthy and complex operation, usually requiring the removal of at least a portion of the source assembly. As a result, beam alignment problems may occur, the operation is time-consuming, and when the ions used in the apparatus are of a hazardous material, such as arsenic, there is some danger of contamination of the operator due to the excessive handling necessary.