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Air Track Vacuum Stop Disclosure Number: IPCOM000068913D
Original Publication Date: 1978-Mar-01
Included in the Prior Art Database: 2005-Feb-20

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Kok, P [+details]


Use of conventional vacuum stops (e.g., ports) in air tracks encounters difficulties in semiconductor wafer handling due to electrostatic build up. When such a wafer moving on an air track is arrested at the vacuum stop (which can be charged with an opposite polarity), the wafer tends to stick, and frequently requires manual intervention for release.