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Spin Coating Edge Build Up Elimination

IP.com Disclosure Number: IPCOM000068993D
Original Publication Date: 1978-Mar-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Decker, SK Erez, N [+details]

Abstract

In spin coating rectangular substrates, a narrow ridge of the coating material is formed at the substrate edge and the coating is markedly thicker over a large fraction of the surface. This ridge, or edge build-up, and the nonuniform coating thickness leave an uneven surface for further processing.