Browse Prior Art Database

Spin Coating Edge Build Up Elimination Disclosure Number: IPCOM000068993D
Original Publication Date: 1978-Mar-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue


Related People

Decker, SK Erez, N [+details]


In spin coating rectangular substrates, a narrow ridge of the coating material is formed at the substrate edge and the coating is markedly thicker over a large fraction of the surface. This ridge, or edge build-up, and the nonuniform coating thickness leave an uneven surface for further processing.