Serialization of Thin Film Devices by Low Cost Photographic Masks
Original Publication Date: 1978-Mar-01
Included in the Prior Art Database: 2005-Feb-20
A computer-controlled cathode ray tube (CRT) is used to generate images for serialization purposes, such as wafer and chip marking. These images are recorded on film and are subsequently used with direct exposure or indirect exposure to mark the wafers and/or chips with numbers.