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This ion-beam monitoring tool allows unscanned ion beams to be analyzed and focused dynamically, and is based on the Faraday cage ion-beam collector principle.
English (United States)
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Faraday Cup Monitor for Ion Beam
This ion-beam monitoring tool allows unscanned ion beams to be analyzed
and focused dynamically, and is based on the Faraday cage ion-beam collector
The monitoring tool includes concentric electron suppressors 10 connected to
a negative bias supply of 500 volts. Adjacent to each suppressor 10 is a
concentric collector 12, which may be connected to a separate current integrator
(not shown). Intermediate each set of suppressor and collector electrodes is a
concentric guard electrode 14 connected to ground potential. All of the
electrodes are physically mounted and isolated from each other by insulated heat
resistant stand-offs (not shown).
For additional monitoring purposes a plurality of Faraday cups 16 and 18,
mounted around the periphery of the top suppressor plate 10, act as collectors
for off-center beams. A central Faraday cup 20 is also provided. In order to
dynamically focus an ion beam, the operator would adjust the beam to minimize
collection on the outside concentric collectors and to provide increased collection
in the center. If after focusing, significant collection is observed on the outside
collectors, the beam may not be focusable or may have a tail.
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