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Contoured Gimbal for Wafer Alignment

IP.com Disclosure Number: IPCOM000069081D
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Coe, GR MacPeek, DL [+details]

Abstract

This is an improvement to a semiconductor wafer alignment tool, such as described in the IBM Technical Disclosure Bulletin, 13, 899-900 (September 1970). In such a tool semiconductor wafers are mounted on a gimbal, which is freely rotatable in any direction, and aligned with a photo-lithographic mask. As described in the previous article, wedge-shaped wafers are easily accommodated by a freely rotating gimbal.