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Calibration Standard for Topographic Inspection of Silicon Wafers

IP.com Disclosure Number: IPCOM000069104D
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Ransom, CM Wisdo, L [+details]

Abstract

In the manufacturing of silicon wafers for computer devices, the quality of the wafer surface is of great importance. At present, inspections are subjective, and there is little information available on the critical sizes of detected defects. Any automatic tool would require a calibration standard.