Calibration Standard for Topographic Inspection of Silicon Wafers
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20
In the manufacturing of silicon wafers for computer devices, the quality of the wafer surface is of great importance. At present, inspections are subjective, and there is little information available on the critical sizes of detected defects. Any automatic tool would require a calibration standard.