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Inspection System for Particulate Contamination

IP.com Disclosure Number: IPCOM000069124D
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Rapa, AC [+details]

Abstract

An on-location particulate contamination detection tool is described. The tool features 360-degree radial illumination from 30 point sources on each of two tiers (see the figure). Each light tier is switchable, providing a choice of either 45-degree or 5-degree incident lighting to accommodate the various surfaces being inspected. (Wafer surfaces varying from blanket metal to personalization can be inspected.) Reflected light is captured by the light cap and a conical trap below the wafer plane. Light scattered from particulates is detected through the center of the unit normal to the product surface.