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Process for Generating Fine Lines

IP.com Disclosure Number: IPCOM000069263D
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Hammer, WN [+details]

Abstract

This article describes a process for generating lines as narrow as 5 Angstroms which are separated by as little as 5 Angstroms.