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Low Mass Linear Translation Device Using Silicon

IP.com Disclosure Number: IPCOM000069267D
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Laff, RA [+details]

Abstract

A low-mass and friction linear bearing may be fabricated by making the ways from oriented silicon using photolithography and preferential etching.