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A low-mass and friction linear bearing may be fabricated by making the ways from oriented silicon using photolithography and preferential etching.
English (United States)
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Low Mass Linear Translation Device Using Silicon
A low-mass and friction linear bearing may be fabricated by making the ways
from oriented silicon using photolithography and preferential etching.
Fig. 1 illustrates a bearing having a way 10 fabricated from an oriented
silicon wafer 11 in which a V-groove has been preferentially etched. Element 12
may have a cylindrical or spherical shape depending upon the remainder of the
bearing structure. The supported element 13 may also be fabricated from
oriented silicon in which a V-groove has been preferentially etched, as shown.
In order to reduce friction, an air bearing (Fig. 2) may be formed by
preferentially etching, from the other side of the wafer, a row of passageways 14
to the bottom of the V-groove through which air flow 15 is directed.
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