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Inspection Apparatus for Mask for Circuit Manufacture

IP.com Disclosure Number: IPCOM000069376D
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Yakubowski, C [+details]

Abstract

The drawing shows apparatus for comparing a newly manufactured mask 2 with a similar mask 3 that is known to be good. Each mask has a glass substrate and a layer of metal that is formed in a desired pattern.