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Inspection Apparatus for Mask for Circuit Manufacture Disclosure Number: IPCOM000069376D
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20

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Related People

Yakubowski, C [+details]


The drawing shows apparatus for comparing a newly manufactured mask 2 with a similar mask 3 that is known to be good. Each mask has a glass substrate and a layer of metal that is formed in a desired pattern.