High Temperature Resist Coating of Poly (Acrylonitrile) via Surface Photopolymerization
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20
The surface photopolymerization of 2-chloro-acrylonitrile was carried out with a bank of low-pressure mercury lamps. With the use of a photosensitizer, a polymer film 1 micron thick can be prepared within several minutes. The polymer is very flow-resistant at high temperatures, and after 30 minutes of heating at 1,000 Degrees C, no dimensional change of pattern was observed.