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Optical Scanner for Surface Analysis

IP.com Disclosure Number: IPCOM000069418D
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Hopkins, WG [+details]

Abstract

The apparatus in the figure can detect flaws, such as nicks, dents and scratches, in the surface of a substrate, defects in the coating, and dust particles or other foreign material located on or near the surface.