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Electrochemical Etching

IP.com Disclosure Number: IPCOM000069422D
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Collins, GC Kirkman, DH [+details]

Abstract

Potassium bromide is used as an etching agent for noble metals. The material is used as electrolyte in a cell which is cycled from 0 to 1080 mV under a ramp potential of 1 V/second. At the counter electrode direct etching of the noble metals takes place. Protection of parts of the counter electrode with photoresist results in enhanced etching close to the resist.