Polyimide Substrated for X-Ray Lithography
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20
Referring to Fig. 1, a thin-film, release agent layer 12 of a metal or any other material exhibits marginal adhesion to a rigid member 11 and, therefore, can be referred to as a release agent. Layer 12 is applied to member 11 by evaporation, sputtering, casting, spinning, etc. Member 11 consists of glass, quartz, sapphire metal, etc., and can withstand temperatures of 100-400 Degrees C.