Browse Prior Art Database

Polyimide Substrated for X-Ray Lithography

IP.com Disclosure Number: IPCOM000069428D
Original Publication Date: 1978-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Feder, R Romankiw, LT Spiller, E Topalian, JC [+details]

Abstract

Referring to Fig. 1, a thin-film, release agent layer 12 of a metal or any other material exhibits marginal adhesion to a rigid member 11 and, therefore, can be referred to as a release agent. Layer 12 is applied to member 11 by evaporation, sputtering, casting, spinning, etc. Member 11 consists of glass, quartz, sapphire metal, etc., and can withstand temperatures of 100-400 Degrees C.